Product introduction
Other advantages

INSTEMS-MET is able to apply straining, heating and biasing inside TEM. It adopts unique MEMS design and innovative integration strategy to overcome many compatibility difficulties in multi-field coupling without compromising double-tilt function of TEM holder. 

It greatly expands the scope of in situ electron microscopy and provides researchers a powerful platform to deal with problems in complex thermal/mechanical/electrical circumstances.

INSTEMS-MT
INSTEMS-MET
 INSTEMS-MT is able to deform samples within a wide tempe-rature range. Extremely localized......
INSTEMS-MET is able to apply straining, heating and biasing inside TEM. It adopts unique......
  • FEATURES
  • SPECIFICATIONS
  • APPLICATIONS

Flexible coupling of thermal/ mechanical/electrical fields                             Double-tilt                                                      Stable atomic-scale imaging

Ultra wide temperature range ( RT-1200 ºC )                                                  Alpha axial tilting up to ±25°                        Ultimate sample drift<50 pm/s 

Ultra high heating precision ( < 0.1 ºC )                                                          Beta axis tilting up to ±25°                            Spatial resolution ≤0.1 nm

Newton level actuator(> 100 mN)

pm-level driving control

Multiple load conditions 

Versatile biasing procedures

pA-level measurement



Mini-lab compatibility

MT/TE/ME/M/E/T

Temperature range

RT up to 1200 ℃ *

Temperature accuracy

≥98%

Heating rate

>10000 °C/s

Max force

> 100 mN

Max displacement

4 μm

Actuation accuracy

< 500 pm

Max voltage

± 50 V *

Current measurement range

1 pA-1 A

Spatial resolution

≤0.1 nm

EDS compatibility

EDS compatibility

*sted specifications are dependent on mini-lab type and microscope configuration. 



Semiconductor

Li-ion battery

Device failure

Thermoelectric materials

High temperature deformation

Creep deformation

Piezolectric materials

Sensor

Nanodevices

Dielectrics  


...



INSTEMS-ME
INSTEMS-TE
INSTEMS-ME is able to realize various electrical application and high precision electrical......
INSTEMS-TE is able to realize various electrical application and high precision electrical......

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